Sinowon Vision Measuring Machine: The Precision Choice for Wafer Geometric Dimension Measurement

In the forefront of semiconductor manufacturing, every wafer embodies the precision and value of cutting-edge technology. Micron-level line widths, spacing, critical dimensions (CD), and complex geometries directly determine chip performance and yield. Traditional measurement methods face significant challenges in accuracy, efficiency, and non-destructive testing. Sinowon, leveraging its leading Vision Measuring Machine technology, provides high-precision, high-efficiency optical measurement solutions for wafer manufacturing, making it the precision choice for quality assurance.

Precision Insight: Sinowon Vision Measuring Machines Empower Wafer Manufacturing

Sinowon's high-end Vision Measuring Machine (VMM) / Optical Measuring Machine (OMM) is specifically designed for inspecting ultra-precision components like wafers. Its core advantages include:

• Advanced Optical Imaging System: Utilizes high-resolution industrial cameras combined with telecentric lenses and a professional lighting system. This ensures sharp imaging of wafer surface features with clear edges, eliminating traditional optical distortion and laying the foundation for accurate Geometric Dimension Measurement.
• Micron-Level Accuracy Guarantee: Equipped with a precision motion control system and advanced image processing algorithms, the instrument effortlessly achieves sub-micron (µm-level) repeatability. It accurately captures the most minute dimensional changes and topographical features on wafers.
• Non-Contact, Non-Destructive Measurement: Employs a purely optical measurement method, completely eliminating the risk of surface damage or contamination associated with contact measurement. This ensures the absolute safety of valuable wafers during inspection.

Comprehensive Control of Wafer Critical Geometric Dimensions

The core value of Sinowon's Vision Measuring Machine lies in its powerful Geometric Dimension Measurement capabilities, comprehensively covering essential wafer inspection needs:

• Line Width & Spacing: Precisely measures wafer surface conductor width (Line Width) and spacing (Space), ensuring circuit patterns strictly adhere to design specifications.
• Critical Dimensions (CD): Performs high-precision measurement and monitoring of critical structural dimensions that determine device performance.
• Position & Distance: Measures precise distances and position accuracy between feature points and patterns, evaluating overlay alignment accuracy.
• Angles & Radii: Analyzes geometric parameters like angles between complex patterns and arc radii.
• 2D Topography Analysis: Clearly visualizes and accurately measures the 2D shape contours of wafer surfaces.
• Height & Step Measurement: Precisely measures height differences, step height, coplanarity, and bump height (micro bumps) on wafer surfaces. This provides crucial data for evaluating film thickness, etch depth, and bump consistency – a vital complement to 2D measurements, ensuring 3D structural accuracy.

Automation & Intelligence: Driving an Efficiency Revolution

Facing massive wafer inspection demands, Sinowon's Vision Measuring Machine integrates powerful automation and intelligence:

• Auto-Focus & Navigation: Rapidly locates wafer feature regions, significantly boosting inspection efficiency.
• Programmed Batch Measurement: Pre-set measurement programs enable automated inspection of multiple wafers in a single batch with one click, dramatically saving labor and time costs.
• Intelligent Data Analysis: Automatically generates detailed measurement reports (e.g., SPC statistical analysis), visually presenting dimensional distribution, trends, and process capability (CPK). This provides immediate, reliable data support for process optimization. (Note: "Video Measuring System" capabilities are inherent in this automation and analysis functionality).

Choose Sinowon, Choose Precision Assurance for Wafer Measurement

As the semiconductor industry pursues higher integration density and smaller line widths, the accuracy of Geometric Dimension Measurement has become paramount. Sinowon, a leader in Optical Measuring Machine (OMM) technology, delivers Vision Measuring Machines renowned for their exceptional optical performance, stable measurement accuracy, highly efficient automated workflows, and robust Geometric Dimension analysis capabilities. They are indispensable precision instruments for wafer manufacturing and quality control.

Sinowon remains committed to innovation, providing trusted measurement solutions for the global semiconductor industry.

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