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Sinowon efficient metrology and measurement systems design for semiconductor

Sinowon efficient metrology and measurement systems design for semiconductor

Model
iMS-2010/2515/3020/4030/5040
Code#
521-170
Accuracy
≤2.5+L/200(um)
Warranty
15-month
Delivery Time
15-day
Standard
GBT 24762
Certificate
Gost,CE
Price
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Quantity Needed:
Pieces
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Sinowon efficient metrology and measurement systems design for semiconductor-1



Brief Induction:

iVision is the 2.5D high accuracy geometric vision measuring machines with optical detent zoom lens and Z-axis height measurement function , it is widely applied at the industry of 3C, semiconductor, PCB, automobile parts, medical parts, precise molds, aviation and aerospace, etc.

Product Characteristic:

l  High precision marble base and pillar ensures the high stability of vision measuring system;

l  High precision toothless rod and fast moving locking device ensures repeatability error is less than 2um;

l  High precise working stage with 0.5um optical linear scales ensures the accuracy is less than 2.5+L/200um;

l  High definitive detent zoom lens and high resolution color camera ensures clear image without distortion;

l  With programmable surface 4-ring 8-division LED Cold Illumination and contour LED telecentric illumination and built-in intelligent light adjustment, it can automatic control the brightness in the 4-ring 8-division.


 

Technical Specification

Mode

iMS-2010

iMS-2515

iMS-3020

iMS-4030

iMS-5040

Code#

521-140

521-150

521-160

521-170

521-180

Working Table

270x350mm

408x308mm

458x358mm

608x470mm

650x580mm

Material

Marble Table

Metal Table

Metal Table

Metal Table

Marble Table

Glass Table

142x242mm

306x198mm

356x248mm

456x348mm

541x441mm

X/Y-axis Travel

200x100mm

250x150mm

300x200mm

400x300mm

500x400mm

Z-axis Travel

High-precision linear guide , working travel   200mm

X/Y/Z-axis Travel

0.0005mm

X/Y-axis Accuracy

≤2.5+L/200(um)

Hysterisis Error

2um

Base and Pillar

High Accuracy Jinan Qing Marble

Illumination System(Software Adjustment)

Surface: Stepless Adjustable 4-ring 8-division   LED Cold Illumination

Contour: LED Parallel Illumination

LED Laser Navigation Lights

CCD Camera

High Resolution 700TV Color CCD Camera

Zoom lens

6.5X High Resolution Detented Zoom Lens

Magnification0.7X~4.5XVideo Magnification26X~172X

Working Environment

Temperature20℃±2, change range < 2/hr

Humidity30% ~80%RH

Vibration<0.002g<15Hz

Measuring Software

iMeasuring 2.1

Operation System

Support XPWIN7WIN8.1WIN 10, 32/64 operating system

Language

English, Simplified Chinese, Traditional   Chinese, other language versions can be added

Dimension(W*D*H)

677x552x998mm

790x617x1000mm

838x667x1000mm

1002x817x1043mm

1104x852x1085mm

Net Weight

150Kg

175Kg

185Kg

350Kg

380Kg



Sinowon efficient metrology and measurement systems design for semiconductor-2




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